Substrate loss mechanisms for microstrip and CPW transmission lines on lossy silicon wafers

Author:

Lederer Dimitri,Raskin Jean-Pierre

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Losses in microstrip;Pucel;IEEE Trans. Microwave Theory Tech.,1968

2. RF loss and crosstalk on extremely high resistivity Si fabricated by ion implantation (10 k–1 MΩcm);Wu;IEEE MTT Digest,2000

3. Coplanar waveguides and microwave inductors on silicon substrates;Reyes;IEEE Trans. Microwave Theory Tech.,1995

4. SiO2 interface layer effects on microwave loss of high-resistivity CPW line;Wu;IEEE Microwave Guided Wave Lett.,1999

5. High frequency properties of silicon-on-insulator and novel depleted silicon materials;Johansson;Solid-State Electron.,2001

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