Author:
Keagy John A.,Zhang Xiaogang,Johnston Keith P.,Busch Eric,Weber Frank,Wolf P. Josh,Rhoad Todd
Subject
Physical and Theoretical Chemistry,Condensed Matter Physics,General Chemical Engineering
Reference63 articles.
1. Semiconductor Industry Association, International Technology Roadmap for Semiconductors (2003), available at http://public.itrs.net.
2. Supercritical CO2 for ULK/Cu integration;Danel,2003
3. Challenges of back end of the line for sub 65nm generation;Fayolle;Microelectron. Eng.,2003
4. Wafer cleaning—an economical solution for BEOL post-ash residue removal;Loper;Solid State Technol.,2001
5. Integration challenges of porous ultra low-k spin-on dielectrics;Mosig;Microelectron. Eng.,2002
Cited by
35 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献