Author:
Cicala G.,Bruno P.,Losacco A.M.
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Diamond-like amorphous carbon
2. Surface reaction probabilities and kinetics of H, SiH3, Si2H5, CH3, and C2H5 during deposition of a-Si:H and a-C:H from H2, SiH4, and CH4 discharges
3. Growth mechanism of amorphous hydrogenated carbon
4. Surface and plasma simulation of deposition processes: CH4plasmas for the growth of diamondlike carbon
5. G. Cicala, P. Bruno, M.A. Losacco, G. Mattei, Surf. Coat. Sci., in press
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