Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition-Reference-Cited by-同舟云学术

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Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition

Published:2018-01-04 Issue:2 Volume:20 Page:025505
ISSN:1009-0630
Container-title:Plasma Science and Technology
language:
Short-container-title:Plasma Sci. Technol.

Author:

JI Peiyu,YU Jun,HUANG Tianyuan,JIN Chenggang,YANG Yan,ZHUGE Lanjian,WU Xuemei

Funder

National Magnetic Confinement Fusion Program of China

Project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD)

National Natural Science Foundation of China

Project funded by China Postdoctoral Science Foundation

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

http://stacks.iop.org/1009-0630/20/i=2/a=025505/pdf

Reference37 articles.

1. Raman spectroscopy of hydrogenated amorphous carbons

2. Structure and optical properties of Cu-DLC composite films deposited by cathode arc with double-excitation source

3. Long-term stability of hydrogenated DLC coatings: Effects of aging on the structural, chemical and mechanical properties

4. Effects of substrate temperature on bonding structure and mechanical properties of amorphous carbon films

5. Diamond-like carbon coating of alternative metal alloys for medical and surgical applications

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1. Modulation of structure and corrosion behavior of Si-DLC coatings on AZ31 by applying a self-source bias;Ceramics International;2023-10

2. In-situ diagnosis of Ar/CH₄ helicon wave plasma for synthesis of carbon nanomaterials;Acta Physica Sinica;2021

3. Hydrogen-modulated Ar/CH4 HWP-CVD for fast preparation of multi-wall carbon nanotube arrays with high specific capacitance;Diamond and Related Materials;2020-11

4. Fast preparation of vertical graphene nanosheets by helicon wave plasma chemical vapor deposition and its electrochemical performance;Diamond and Related Materials;2020-10

5. The structure and properties of amorphous diamond-like carbon films deposited by helicon wave plasma chemical vapor deposition;Thin Solid Films;2020-09

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