Fabrication of a microlens array on diamond for Shack-Hartmann sensor
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. Fabrication of large-area concave microlens array on silicon by femtosecond laser micromachining;Deng;Opt. Lett.,2015
2. Self-assembly of amorphous calcium carbonate microlens arrays;Lee;Nat. Commun.,2012
3. Optical nanofabrication of concave microlens arrays;Liu;Laser Photonics Rev.,2019
4. High fill factor microlens array fabrication using direct laser writing and its application in wavefront detection;Huang;Opt. Lett.,2020
5. Design and fabrication of long-focal-length microlens arrays for Shack–Hartmann wavefront sensors;Lin;Micro Nano Lett.,2011
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