Diamond-based capacitive micromachined ultrasonic transducers-Reference-Cited by-同舟云学术

Diamond-based capacitive micromachined ultrasonic transducers

Published:2012-02 Issue: Volume:22 Page:6-11
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Bayram Baris

Funder

The Scientific and Technological Research Council of Turkey

Middle East Technical University

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. A surface micromachined electrostatic ultrasonic air transducer

2. Capacitive micromachined ultrasonic transducers: fabrication technology

3. Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology

4. V. Ralchenko, T. Galkina, A. Klokov, A. Sharkov, S. Chernook, V. Martovitsky, in: D. Flandre, A. N. Nazarov, P. L. F. Hemment (Eds.), 2005, pp. 77–84.

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Incorporation of nitrogen in diamond films – A new way of tuning parameters for optical passive elements;Diamond and Related Materials;2021-01

2. Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review;Sensors;2020-06-23

3. Evaluation of CMUT Performance Under Different Excitation Signals and Electrode Coverage;2019 11th International Conference on Electrical and Electronics Engineering (ELECO);2019-11

4. A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone;IEEE Access;2019

5. Fabrication and Packaging of CMUT Using Low Temperature Co-Fired Ceramic;Micromachines;2018-10-27