Author:
Kusterer J.,Lüker A.,Herfurth P.,Men Y.,Ebert W.,Kirby P.,O'Keefe M.,Kohn E.
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films
2. Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems
3. “Pb(Zr,Ti)O3 on CVD diamond: A new material system for MEMS actuators”, Presented at the Diamondconference 2006, 17th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides & Silicon Carbide, 3–8 September, 2006;Kusterer,2006
4. “Piezoelectric Ceramics: Principles and Applications”, Mackeyville, PA, USA;APC International Ltd.,2002
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