Ablation of various materials with intense XUV radiation-Reference-Cited by-同舟云学术

Ablation of various materials with intense XUV radiation

Published:2003-07 Issue:1-2 Volume:507 Page:577-581
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Juha Libor,Krasa Josef,Cejnarova Andrea,Chvostova Dagmar,Vorlíček Vladimír,Krzywinski Jacek,Sobierajski Ryszard,Andrejczuk Andrzej,Jurek Marek,Klinger Dorota,Fiedorowicz Henryk,Bartnik Andrzej,Pfeifer Miroslav,Kubát Pavel,Pína Ladislav,Kravárik Jozef,Kubeš Pavel,Bakshaev Yuri L.,Korolev Valeri D.,Chernenko Andrei S.,Ivanov Mikhail I.,Scholz Marek,Ryc Leszek,Feldhaus Josef,Ullschmied Jiri,Boody Frederick P.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference18 articles.

1. Direct engraving on positive resists by synchrotron radiation

2. O2Plasma Etch Rate Reduction on Synchrotron Radiation Exposed PMMA Film

3. Submicron x‐ray lithography using laser‐produced plasma as a source

4. ABLATION OF POLY(METHYL METHACRYLATE) BY A SINGLE PULSE OF SOFT X-RAYS EMITTED FROM Z-PINCH AND LASER-PRODUCED PLASMAS

5. A new powerful source for coherent VUV radiation: Demonstration of exponential growth and saturation at the TTF free-electron laser

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