Author:
Marchal J,Passmore M.S,Abdalla M,Berg J.van den,Nejim A,Fröjdh Ch,O’Shea V,Smith K.M,Rahman M
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
1 articles.
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1. A new pixel sensor for uniformity control in ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-05