Two aspects of thin film analysis: boron profile and scattering length density profile-Reference-Cited by-同舟云学术

Two aspects of thin film analysis: boron profile and scattering length density profile

Published:2003-06 Issue:1-2 Volume:505 Page:531-535
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Chen-Mayer H.H.,Lamaze G.P.,Coakley K.J.,Satija S.K.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference8 articles.

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4. Proceedings of the 2000 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, Maryland, June 2000;Chen-Mayer,1999

5. Characterization and Metrology for ULSI Technology;Lamaze,1998

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