Study of thermal effects in GaAs micromachined power sensor microsystems by an optical interferometer technique

Author:

Pogany D.,Seliger N.,Lalinský T.,Kuzmík J.,Habaš P.,Hrkút P.,Gornik E.

Publisher

Elsevier BV

Subject

General Engineering

Reference15 articles.

1. Thermal wattmeter with direct power conversion;Grno;IEEE Trans. Instrum. Meas.,1994

2. Monolithic GaAs MESFET power sensor microsystem;Lalinský;Electron. Lett.,1995

3. Heterodyne interferometer for the detection of electric and thermal signals in integrated circuits through the substrate;Goldstein;Rev. Sci. Instrum.,1993

4. Thermal imaging and measurement techniques for electronic materials and devices;Kölzer,1995

5. Thermal imaging and measurement techniques for electronic materials and devices;Kölzer;Microelectronics Eng.,1996

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