UV radiation effects of argon plasma on Si−SiO2 structures

Author:

Kassabov J.,Atanassova E.,Dimitrov D.,Goranova E.

Publisher

Elsevier BV

Subject

General Engineering

Reference17 articles.

1. Carrier Mobility in Inversion Layers and RF Plasma Induced Radiation Defects at the Si−SiO2 Interface;Kassabov;Solid State Electronics,1984

2. Inversion Channel Transport Properties of Plasma-Treated Si−SiO2 Structures with Different Oxide Thickness;Kassabov;Plasma News Report,1986

3. Kassabov. J., Atanassova, E., Dimitrov, D. and Goranova, E., “Argon-Plasma Treatment Effects on Si−SiO2 Structures”, Solid State Electronics, in press.

4. Kassabov, J., Atanassova, E., Dimitrov, D. and Goranova, E., “Helium Plasma-Induced Interface and Oxide Charges in Si−SiO2 Structure”, Semiconductor Science and Technology, in press.

5. MOS (Metal-Oxide-Semiconductor) Physics and Technology,1982

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