Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products-Reference-Cited by-同舟云学术

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Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products

Published:1998-09 Issue:9 Volume:29 Page:579-586
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Chau Kevin H.-L.,Sulouff Robert E.

Publisher

Elsevier BV

Subject

General Engineering

Reference28 articles.

1. Polysilicon integrated microsystems: technologies and applications;Howe,1995

2. Fine grained polysilicon and its applications to planar pressure transducers;Guckel,1987

3. A versatile polysilicon diaphragm pressure sensor chip;Chau,1991

4. Planar surface-micromachined pressure sensor with a sub-surface, embedded reference pressure cavity;Eaton;SPIE,1996

5. Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry;Yun,1992

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