1. An electrostatic micro actuator for a magnetic head tracking system of hard disk drives;Nakamura,1997
2. A three-dimentional shape memory alloy loop actuator;Nakamura,1997
3. Fabrication and operation of electrostatic micro torsion mirrors for optical switches;Toshiyoshi,1996
4. A Micromachined microwave antenna integrated with its electrostatic spatial scanning;Chauvel,1997
5. Microfabricated hinges;Pister;Sensor and Actuators (A),1992