Tribological Aspects of Microsystems-Reference-Cited by-同舟云学术

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Tribological Aspects of Microsystems

Published:1998 Issue: Volume: Page:83-113
ISSN:1386-2766
Container-title:Micro Mechanical Systems - Principles and Technology
language:
Short-container-title:

Author:

Zum Gahr K.-H.

Publisher

Elsevier

Reference36 articles.

1. Frictional study of IC-processed micromotors;Tai;Sensors and Actuators,1990

2. In situ friction and wear measurements in integrated polysilicon mechanisms;Gabriel;Sensors and Actuators,1990

3. The measurements of friction on micromechatoronics elements;Noguchi,1991

4. Design rules and test of electrostatic micromotors made by the LIGA process;Wallrabe;J. Micromech. Microeng.,1994

5. Tribological Measurements for MEMS applications;Beerschwinger,1994

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Review of current best-practices in machinability evaluation and understanding for improving machining performance;CIRP Journal of Manufacturing Science and Technology;2024-06

2. ニュースバルにおけるX線リソグラフィー微細加工;Journal of The Japan Institute of Electronics Packaging;2023-08-01

3. Correlation between surface textural parameter and tribological behaviour of four metal materials with laser surface texturing (LST);Applied Surface Science;2022-05

4. Effect of the Microstructure on the Wear Resistance of a Pearlitic Steel;Materials Research;2020

5. Microtribological Characterization of Engineering Ceramic, Cemented Carbide and Steel under Rolling Conditions;Friction, Wear and Wear Protection;2011-02-03

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