Hexagonal silicon formation by pulsed laser beam annealing
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference13 articles.
1. High‐resolution transmission electron microscopy study of solid phase crystallized silicon thin films on SiO2: Crystal growth and defects formation
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4. Pulsed laser crystallization and doping for the fabrication of high-quality poly-Si TFTs
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2. Photoluminescence of ion-synthesized 9R-Si inclusions in SiO2/Si structure: Effect of irradiation dose and oxide film thickness;Applied Physics Letters;2021-05-24
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