Fixed abrasive grinding of CVD SiC mirrors-Reference-Cited by-同舟云学术

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Fixed abrasive grinding of CVD SiC mirrors

Published:1994-04 Issue:2 Volume:16 Page:109-116
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Bifano Thomas,Yi Yuan,Kahl Keith

Publisher

Elsevier BV

Subject

General Engineering

Reference23 articles.

1. SiC—an emerging material;Pickering,1989

2. Chemically vapor deposited silicon carbide (SiC) for optical applications;Pickering;Nucl Instruments Methods Physics Res,1990

3. Some speculations on the mechanics of abrasive grinding and polishing;Brown,1987

4. Ductile-regime grinding: a new technology for machining brittle materials;Bifano;ASME J Eng Industry,1991

5. Microgrinding of brittle materials;Bifano,1988

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1. Ductile-Brittle Transition Mechanism of Highly-Oriented 3c-Sic in Elid;2024

2. Chemical mechanical polishing of silicon carbide (SiC) based on coupling effect of ultrasonic vibration and catalysis;Journal of Environmental Chemical Engineering;2023-10

3. Investigation of the material removal process in in-situ laser-assisted diamond cutting of reaction-bonded silicon carbide;Journal of the European Ceramic Society;2023-06

4. Fabrication Methods for Microscale 3D Structures on Silicon Carbide;International Journal of Precision Engineering and Manufacturing;2022-10-12

5. Relation between etching profile and voltage–current shape of sintered SiC etching by atmospheric pressure plasma;Plasma Science and Technology;2019-01-31

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