A new hydro-fluorinated amorphous silicon produced by using intermediate species SiF2
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference7 articles.
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1. Benchmarking quantum chemistry compound methods for the temperature‐dependent thermochemical data of Si x H y and Si x F y series;International Journal of Quantum Chemistry;2022-11-30
2. Selective excitation of GeF and GeF2in glow discharges of GeF4;Journal of Applied Physics;1993-08
3. Chemical Vapor Deposition Under Plasma Conditions;Film Deposition by Plasma Techniques;1992
4. Effect of fluorine on the structural and electronic properties ofa-Si:H:F;Physical Review B;1990-04-15
5. Triplet Exciton States in a-Si:H and Its Alloys as Elucidated by Optically Detected Magnetic Resonance Measurements;Journal of the Physical Society of Japan;1989-09-15
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