Chemical reactions for propagation of Si-network
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. “Semiconductors and Semimetals” vol21 A-D,1984
2. Glow-discharge amorphous silicon: Growth process and structure
3. Measurement of the SiH3Radical Density in Silane Plasma using Infrared Diode Laser Absorption Spectroscopy
4. Diffusion Coefficient and Reaction Rate Constant of the SiH3Radical in Silane Plasma
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