Determination of hydrogen concentration depth profiles in a-Si:H by Secondary Neutral Mass Spectrometry (SNMS)
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. Recent applications of secondary neutral mass spectrometry for quantitative analysis of homogeneous and structured samples
2. Characterization of reactively magnetron sputtered hydrogenated amorphous silicon films
3. Quantitative depth profile and bulk analysis with high dynamic range by electron gas sputtered neutral mass spectrometry
4. Plasma studies on the Leybold–Heraeus INA3 secondary neutral mass spectrometry system
5. Secondary Ion Mass Spectroscopy SIMS III;Oechsner,1982
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