Plasma studies on the Leybold–Heraeus INA3 secondary neutral mass spectrometry system
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.575026
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3. Theoretical and experimental characterization of a low-pressure rf plasma and its optimization in electron-gas secondary-neutral mass spectrometry;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2001-01
4. Influence of the process gas, gas pressure, r.f. power and geometrical arrangement on the magnetron plasma parameters for various thin film materials of the systems Ti=N and B=C=N;Surface and Coatings Technology;1999-09
5. Energy spectra of secondary neutrals obtained by means of the electrostatic energy filter of a commercial low-pressure HF-plasma secondary neutral mass spectrometer;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1997-11
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