Author:
Parsons G.N.,Tsu D.V.,Lucovsky G.
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. The Physics of Hydrogenated Amorphous Silicon I;Thompson,1984
2. Deposition of silicon dioxide and silicon nitride by remote plasma enhanced chemical vapor deposition
3. G Lucovsky and DV Tsu, these proceedings.
4. DV Tsu and G Lucovsky, these proceedings.
Cited by
37 articles.
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