The structure of thermally grown noncrystalline SiO2 films on silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Noncrystalline silicon dioxide films on silicon: A review
2. Oxygen and silicon diffusion-controlled processes in vitreous silica
3. General Relationship for the Thermal Oxidation of Silicon
4. Thermal Oxidation of Silicon: In Situ Measurement of the Growth Rate Using Ellipsometry
5. An 18O Study of the Oxidation Mechanism of Silicon in Dry Oxygen
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1. A Self-Consistent Model for Thermal Oxidation of Silicon at Low Oxide Thickness;Advances in Condensed Matter Physics;2016
2. Probability of Atomic or Molecular Oxygen Species in Silicon and Silicon Dioxide;Japanese Journal of Applied Physics;2003-10-09
3. Diffusion of Molecular and Atomic Oxygen in Silicon Oxide;Japanese Journal of Applied Physics;2003-06-15
4. Space Charge Analysis in Thin SiO2 Films: Local Vs. Uniform Degradation Models;MRS Proceedings;1997
5. 18O diffusion through amorphous SiO2and cristobalite;Applied Physics Letters;1993-10-04
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