Defects in amorphous hydrogenated silicon nitride films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference40 articles.
1. Electron Spin Resonance in Discharge-Produced Silicon Nitride
2. The electronic properties of plasma‐deposited films of hydrogenated amorphous SiNx(0
3. Electron spin resonance study of metal-nitride-silicon structures: Observation of Si dangling bonds with different configurations and trapping properties in silicon nitride
4. Calculations of the g-value and linewidth of the esr signal in amorpous silicon nitride
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