Photo-oxidation of a-Si:C:H studied by in situ XPS
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Optical constants of a series of amorphous hydrogenated silicon-carbon alloy films: Dependence of optical response on film microstructure and evidence for homogeneous chemical ordering
2. Structural analysis of amorphous hydrogenated silicon-carbon thin films from silane/propane mixtures
3. High spatial resolution photo-oxidation of a-Si:C at low temperatures H films
4. Photo-oxidation of a-Si : C : H films
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