1. A high-performance planar piezoresistive accelerometer;Partridge;J. Microelectromech. Syst.,2000
2. Piezoresistive CMOS beams for inertial sensing;Chaehoi,2003
3. A silicon piezoresistive pressure sensor;Singh,2002
4. High-temperature piezoresistive pressure sensor based on implantation of oxygen into silicon wafer;Li;Sensor Actuator Phys.,2012
5. Method for sensitivity improvement and optimal design of a piezoresistive pressure sensor;Hsieh,2010