Built-in-self-test techniques for MEMS

Author:

Mir S.,Rufer L.,Dhayni A.

Publisher

Elsevier BV

Subject

General Engineering

Reference32 articles.

1. B. Murari, Lateral thinking: the challenge of Microsystems, in: Proceedings of 12th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers’03), Boston, June 2003.

2. Generation of electrically induced stimuli for MEMS self-test;Charlot;J. Electron. Testing: Theory Appl.,2001

3. Accelerometer systems with self-testable features;Terry;Sensors Actuators,1989

4. Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability;Zimmermann;Sensors Actuators A,1995

5. Monolithic Accelerometer with Signal Conditioning. ADXL50 Technical Note,1996

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