A large-scale parametric study of InP deposition on patterned substrates
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Published:2006-10
Issue:10
Volume:37
Page:1056-1063
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ISSN:0026-2692
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Container-title:Microelectronics Journal
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language:en
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Short-container-title:Microelectronics Journal
Author:
Greenspan Jonathan E.
Subject
General Engineering