1. Micro resonant force gauges;Tilmans;Sens. Actuators A: Phys.,1992
2. A vacuum packaged surface micromachined resonant accelerometer;Seshia;J. Microelectromech. Syst.,2002
3. Design criteria of low-power oscillators for consumer-grade MEMS resonant sensors;Langfelder;IEEE Trans. Ind. Electron.,2014
4. K.E. Wojciechowski, B.E. Boser, A.P. Pisano, A MEMS resonant strain sensor operated in air, in: Proceedings of 17th IEEE International Conference on MEMS, Micro Electro Mechanical Systems, 2004.
5. A.A. Seshia, R.T. Howe, S. Montague, An integrated microelectromechanical resonant output gyroscope, in: Proceedings of The Fifteenth IEEE International Conference on MEMS, Micro Electro Mechanical Systems, 2002.