Improvement of chemical mechanical polishing performance by introducing N–Si bond via external coating of cerium oxide with ZIF-8
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Published:2024-07
Issue:
Volume:50
Page:104488
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ISSN:2468-0230
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Container-title:Surfaces and Interfaces
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language:en
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Short-container-title:Surfaces and Interfaces
Author:
Chen ChuandongORCID,
Liu Yang,
Li Xiaopei,
Cui Yanying,
Shen Sida,
Liao WupingORCID,
You HongpengORCID
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