Flow analysis of a front opening unified pod (FOUP) subjected to different fan filter unit (FFU) coverage area in mini-environment-Reference-Cited by-同舟云学术

Flow analysis of a front opening unified pod (FOUP) subjected to different fan filter unit (FFU) coverage area in mini-environment

Published:2021-11 Issue: Volume:12 Page:100124
ISSN:2666-2027
Container-title:International Journal of Thermofluids
language:en
Short-container-title:International Journal of Thermofluids

Author:

Lin Tee,Zargar Omid Ali,Lee Tzu-Chieh,Sabusap Dexter Lyndon,Li Jian-Jie,Hu Shih-Cheng,Khodadadi Jay M.,Jamshideasli Dourna,Leggett Graham

Funder

Ministry of Science and Technology, Taiwan

Ministry of Science and Technology of the People's Republic of China

Publisher

Elsevier BV

Subject

Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics

Reference28 articles.

1. Review—airborne molecular contamination: recent developments in the understanding and minimization for advanced semiconductor device manufacturing;Den;ECS J. Solid State Sci. Technol.,2020

2. Humidity induced defect generation and its control during organic bottom anti-reflective coating in the photo lithography process of semiconductors;Mun;J. Inf. Commun. Converg. Eng.,2012

3. Defectivity and yield impact from the AMC inside the FOUP in advanced technologies;Barker;IEEE Trans. Semicond. Manuf.,2017

4. Moisture prevention in a pre-purged front-opening unified pod (FOUP) during door opening in a mini-environment;Lin;IEEE Trans. Semicond. Manuf.,2018

5. Defect reduction by nitrogen purge of wafer carriers;van Roijen;IEEE Trans. Semicond. Manuf.,2014

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design of an innovative flow isolation device (FID) as an air flow barrier to control the temperature of large storage areas in cold room applications;International Journal of Thermofluids;2024-08

2. Effective augmentation of front opening unified pod filter images;Displays;2024-07

3. Numerical investigation of an inertization system for a radiative coil coating oven;International Journal of Thermofluids;2023-11

4. The Study of Velocity Field in Front Opening Unified Pod by CAE;Engineering Innovations;2023-10-13

5. Control of flow, thermal and pollutant concentration fields by entrainer air streams to improve fresh air quality intake into a semiconductor manufacture/ processing plant;International Journal of Thermofluids;2022-11