Electron-stimulated desorption from the products of chemisorption of trifluorochloroethene on silicon
Author:
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,Spectroscopy,Condensed Matter Physics,Instrumentation
Reference10 articles.
1. Thermal and electron driven chemistry of CCl4 on oxidized Si(100)
2. Electron-Stimulated Desorption as a Tool for Studies of Chemisorption: A Review
3. Chemical selectivity with ESD of chlorinated silicon species
4. Experimental Innovations in Surface Science;Yates,1997
5. ESDIAD studies of fluorine and chlorine adsorption at Si(100)
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electron-beam (5-10 keV) damage in triplite-group phosphates: Consequences for electron-microprobe analysis of fluorine;American Mineralogist;2006-04-01
2. CF3I on a silicon surface: Adsorption, temperature-programmed desorption, and electron-stimulated desorption;The Journal of Chemical Physics;2002-06-15
3. Current Awareness;Journal of Mass Spectrometry;2001
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