CF4 adsorption on porous carbon derived from silicon carbide

Author:

Choi Seung Wan,Yoon Hyung Jin,Lee Hyeok Joo,Lee Eung-Seok,Lim Dae-Soon,Lee Ki BongORCID

Funder

National Research Foundation of Korea (NRF); South Korea

Korean government's Ministry of Science and ICT

Publisher

Elsevier BV

Subject

Mechanics of Materials,Condensed Matter Physics,General Materials Science,General Chemistry

Reference54 articles.

1. Non-CO2 greenhouse gases and climate change;Montzka;Nature,2011

2. A review of uses, environmental hazards and recovery/recycle technologies of perfluorocarbons (PFCs) emissions from the semiconductor manufacturing processes;Tsai;J. Loss Prev. Process. Ind.,2002

3. Surface wave plasma abatement of CHF3 and CF4 containing semiconductor process emissions;Wofford;Environ. Sci. Technol.,1999

4. Evaluation of fluorocarbon emissions from the aluminum smelting process;Roberts,2016

5. Aviation and the Global Atmosphere: A Special Report of the Intergovernmental Panel on Climate Change;Penner,1999

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