Selectively buried growth of heavily B doped diamond layers with step-free surfaces in N doped diamond (1 1 1) by homoepitaxial lateral growth-Reference-Cited by-同舟云学术

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Selectively buried growth of heavily B doped diamond layers with step-free surfaces in N doped diamond (1 1 1) by homoepitaxial lateral growth

Published:2022-08 Issue: Volume:593 Page:153340
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Kobayashi Kazuki,Zhang Xufang,Makino Toshiharu,Matsumoto Tsubasa,Inokuma Takao,Yamasaki Satoshi,Nebel Christoph E.,Tokuda Norio

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference33 articles.

1. Fabrication of bipolar junction transistor on (001)-oriented diamond by utilizing phosphorus-doped n-type diamond base;Kato;Diam. Relat. Mater.,2013

2. Diamond bipolar junction transistor device with phosphorus-doped diamond base layer;Kato;Diam. Relat. Mater.,2012

3. Normally-off HfO2-gated diamond field effect transistors;Liu;Appl. Phys. Lett.,2013

4. RF Diamond Transistors: Current Status and Future Prospects;Umezawa;Jpn. J. Appl. Phys.,2005

5. Diamond Junction Field-Effect Transistors with Selectively Grown n +-Side Gates;Iwasaki;Appl. Phys Express,2012

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1. Formation of low-dimensional nanopit structures on atomically flat surfaces of diamond (111) by nickel nanoparticles;Applied Surface Science;2024-10

2. Diamond Homoepitaxial Growth Technology toward Wafer Fabrication, Atomically Controlled Surfaces, and Low Resistivity;Accounts of Materials Research;2024-08-13

3. Fabrication of lateral diamond MOSFET with buried pn-junctions by diamond surface planarization based on carbon solid solution into nickel;Diamond and Related Materials;2024-08

4. Impact of water vapor annealing treatments on Al2O3/diamond interface;AIP Advances;2024-03-01

5. Theoretical and experimental research on growth and doping mechanisms of diamond films fabricated using liquid carbon source precursors;Applied Surface Science;2023-08

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