Time of Flight – Secondary Ion Mass Spectroscopy Profiling of Self-Assembled Monolayer Patterns Based on Vapor Deposition Technique

Author:

Li Shi,Zhang Hongru,Liu Zheng,Xu Junquan,Fan Guofang,Li Wei,Li Qi,Hu Xiaodong,Jing Gaoshan

Funder

Ministry of Science and Technology of the People's Republic of China

National Key Research and Development Program of China

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference38 articles.

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2. Scaling below 3nm node: the 3D CMOS integration paradigm (Conference Presentation);Ryckaert,2019

3. The node is nonsense;Moore;IEEE Spectr.,2020

4. The past and future of multi-gate field-effect transistors: Process challenges and reliability issues;Sun;J. Semicond.,2021

5. Improvement in Self-Heating Characteristic by Incorporating Hetero-Gate-Dielectric in Gate-All-Around MOSFETs;Song;IEEE J. Electron Devices Soc.,2021

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