Improved LPCVD-SiNx/AlGaN/GaN MIS-HEMTs by using in-situ MOCVD-SiNx as an interface sacrificial layer
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference26 articles.
1. AlGaN/GaN high-electron-mobility transistor technology for high-voltage and low-on-resistance operation;Kuzuhara;Jpn. J. Appl. Phys.,2016
2. GaN-on-Si power technology: devices and applications;Chen;IEEE Trans. Electron Devices,2017
3. Toward reliable MIS- and MOS-gate structures for GaN lateral power devices;Chen;Phys. Status Solidi A,2016
4. Fabrication and performance of Au-free AlGaN/GaN-on-silicon power devices with Al2O3 and Si3N4/Al2O3 gate dielectrics;Van Hove;IEEE Trans. Electron Devices,2013
5. GaN-based metal-insulator-semiconductor high-electron-mobility transistors using low-pressure chemical vapor deposition SiNx as gate dielectric;Hua;IEEE Electron Device Lett.,2015
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Investigation of the effect of different types of SiN layers and cap-GaN on the surface electronic states of AlGaN/GaN heterostructures with 2DEG using X-ray and UV photoelectron spectroscopy;Applied Surface Science;2023-12
2. Comprehensive Comparison of MOCVD- and LPCVD-SiNx Surface Passivation for AlGaN/GaN HEMTs for 5G RF Applications;Micromachines;2023-11-16
3. Interface charge engineering on an in situ SiNx/AlGaN/GaN platform for normally off GaN MIS-HEMTs with improved breakdown performance;Applied Physics Letters;2023-09-04
4. Effect of in-situ SiNx grown with different carrier gas on structural and electrical properties of GaN-based MISHEMTs;Applied Physics Letters;2023-04-24
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