Scalable fabrication of flexible multi-level nanoimprinting molds with uniform heights via a ‘top-to-bottom’ level patterning sequence-Reference-Cited by-同舟云学术

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Scalable fabrication of flexible multi-level nanoimprinting molds with uniform heights via a ‘top-to-bottom’ level patterning sequence

Published:2018-01 Issue: Volume:428 Page:895-899
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Choi Sungwoo,Kook YunHo,Kim ChulHo,Yoo SoonSung,Park Kwon-Shik,Lee Jinhyung,Park Changsu,Ok Jong G.,Kang Shinill

Funder

Global Leading Technology Program

Ministry of Trade, Industry and Energy, Republic of Korea

National Research Foundation of Korea

Korean Government

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference16 articles.

1. Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns;Ahn;Appl. Phys. Lett.,2006

2. Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography;Han;J. Phys. D: Appl. Phys.,2009

3. Fabrication of microlens arrays by a rolling process with soft polydimethylsiloxane molds;Hu;J. Micromech. Microeng.,2011

4. Pilot Production of Photonic Devices by Roll-to-Roll Nanoimprinting;Mäkelä;J. Photopolym. Sci. Technol.,2012

5. Bilayer metal wire-grid polarizer fabricated by roll-to-roll nanoimprint lithography on flexible plastic substrate;Ahn;J. Vac. Sci. Technol. B,2007

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atomistic simulations on nanoimprinting of copper by aligned carbon nanotube arrays under a high-frequency mechanical vibration;Nanotechnology;2019-10-24

2. Recent Progress in Ultraviolet Nanoimprint Lithography and Its Applications;Journal of Nanoelectronics and Optoelectronics;2019-03-01

3. Formation of nanopore and nanopillar patterned polymer films from mixed PAA-PI solutions by phase separation method;Molecular Crystals and Liquid Crystals;2019-01-22

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