SiOxNy thin films with variable refraction index: Microstructural, chemical and mechanical properties-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

SiOxNy thin films with variable refraction index: Microstructural, chemical and mechanical properties

Published:2010-05 Issue:14 Volume:256 Page:4548-4553
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Godinho V.,Haro M.C. Jiménez de,García-López J.,Goossens V.,Terryn H.,Delplancke-Ogletree M.P.,Fernandez A.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference29 articles.

1. Study of the mechanical and structural properties of silicon oxynitride films for optical applications

2. Ultrathin (<4 nm) SiO2 and Si–O–N gate dielectric layers for silicon microelectronics: Understanding the processing, structure, and physical and electrical limits

3. Plasma deposition of optical films and coatings: A review

4. Surface passivation of silicon by rf magnetron-sputtered silicon nitride films

5. Plasma-deposited passivation layers for moisture and water protection

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Inhibiting crystallization and enhanced non-wettability against molten Si of fused silica ceramic with addition of β-Si3N4;Journal of Crystal Growth;2023-07

2. Optically tuned low temperature processed silicon nitride and oxynitride multilayer antireflection coatings for crystalline silicon solar cells;3RD INTERNATIONAL CONFERENCE ON MATHEMATICAL TECHNIQUES AND APPLICATIONS (e-ICMTA-2022);2023

3. Design and optimization of single, double and multilayer anti-reflection coatings on planar and textured surface of silicon solar cells;Materials Today Communications;2022-08

4. Room-temperature deposition of low H-content SiNx/SiNxOy thin films using a specially designed PECVD system;Surface and Coatings Technology;2020-11

5. A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film;Micromachines;2019-08-20

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3