Direct nanoimprinting of single crystalline gold: Experiments and dislocation dynamics simulations-Reference-Cited by-同舟云学术

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Direct nanoimprinting of single crystalline gold: Experiments and dislocation dynamics simulations

Published:2014-01 Issue: Volume:290 Page:301-307
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Zhang J.,Zhang Y.,Mara N.A.,Lou J.,Nicola L.

Funder

Dutch National Scientific Foundation NWO

Dutch Technology Foundation STW

Air Force Office of Sponsored Research (AFOSR) YIP award

NSF

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference35 articles.

1. Fabrication of subwavelength aluminum wire grating using nanoimprint lithography and reactive ion etching;Ahn;Microelectron. Eng.,2005

2. Study on polarizing visible light by subwavelength-period metal-stripe gratings;Schnabel;Opt. Eng.,1999

3. Fabrication of large area 100nm pitch grating by spatial frequency doubling and nanoimprint lithography for subwavelength optical applications;Yu;J. Vac. Sci. Technol. B,2001

4. Microfabrication of an electromagnetic power relay using SU-8 based UV-LIGA technology;Williams;Microsyst. Technol.,2004

5. Fabrication, assembly, and testing of Cu- and Al-based microchannel heat exchangers;Mei;J. Microelectromech. Syst.,2008

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1. Deformation Mechanism of Aluminum, Copper, and Gold in Nanoimprint Lithography Using Molecular Dynamics Simulation;Nanomaterials;2023-12-08

2. Classification of slip system interaction in microwires under torsion;Computational Materials Science;2023-01

3. Molecular Dynamics Investigation of the Deformation Mechanism of Gold with Variations in Mold Profiles during Nanoimprinting;Materials;2021-05-14

4. Molecular dynamics investigation of material deformation behavior of PMMA in nanoimprint lithography;AIP Advances;2020-09-01

5. Atomistic investigation of process parameter variations on material deformation behavior in nanoimprint lithography of gold;Precision Engineering;2020-07

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