Effect of addition of amino acids with hydrophilic side chains to low-concentration H3PO4 for improvement of Si3N4 etching kinetics and oxide regrowth phenomena on multi-layered Si3N4/SiO2 structures-Reference-Cited by-同舟云学术

Effect of addition of amino acids with hydrophilic side chains to low-concentration H3PO4 for improvement of Si3N4 etching kinetics and oxide regrowth phenomena on multi-layered Si3N4/SiO2 structures

Published:2023-11 Issue: Volume:638 Page:158118
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Park Taegun,Kim Taehyeon^ORCID,Han Jongwon^ORCID,Lim Sangwoo^ORCID

Funder

Ministry of Trade, Industry and Energy

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

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2. Behavior of oxide regrowth during the selective Si3N4 etching process on 3D NAND structures using finite element computational simulations;Journal of Industrial and Engineering Chemistry;2024-02