Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference74 articles.
1. Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017;Greene;J. Vac. Sci. Technol. A Vacuum, Surfaces, Film.,2017
2. J.A. De Toro, P.S. Normile, C. Binns, Types of Cluster Sources, in: Gas‐Phase Synth. Nanoparticles, 2017: pp. 39–55. doi:https://doi.org/10.1002/9783527698417.ch3.
3. Thin films from energetic cluster impact: A feasibility study;Haberland;J. Vac. Sci. Technol. A Vacuum, Surfaces, Film.,1992
4. Filling of micron-sized contact holes with copper by energetic cluster impact;Haberland;J. Vac. Sci. Technol. A Vacuum, Surfaces, Film.,1994
5. Physics and technology of magnetron sputtering discharges;Gudmundsson;Plasma Sources Sci. Technol.,2020
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