Carbon ion self–sputtering attained by sublimation of hot graphite target and controlled by pulse injection of a neon–helium gas mixture-Reference-Cited by-同舟云学术

Carbon ion self–sputtering attained by sublimation of hot graphite target and controlled by pulse injection of a neon–helium gas mixture

Published:2023-05 Issue: Volume:620 Page:156708
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Wicher Bartosz^ORCID,Chodun Rafał,Greczynski Grzegorz^ORCID,Lachowski Artur^ORCID,Trzcinski Marek^ORCID,Pshyk Aleksandr V.,Król Krystian,Kulikowski Krzysztof,Skowroński Łukasz,Zdunek Krzysztof^ORCID

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

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2. Chromium coatings deposited by cooled and hot target magnetron sputtering for accident tolerant nuclear fuel claddings;Kashkarov;Surf. Coatings Technol.,2020

3. Surface erosion of hot Cr target and deposition rates of Cr coatings in high power pulsed magnetron sputtering;Bleykher;Surf. Coatings Technol.,2018

4. Current–voltage characteristics of an impulse magnetron discharge in target material vapor;Kaziev;J. Phys. Conf. Ser.,2020

5. Evaporation factor in productivity increase of hot target magnetron sputtering systems;Bleykher;Vacuum.,2016

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