Homogeneous transparent conductive ZnO:Ga by ALD for large LED wafers-Reference-Cited by-同舟云学术

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Homogeneous transparent conductive ZnO:Ga by ALD for large LED wafers

Published:2016-08 Issue: Volume:379 Page:304-308
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Szabó Zoltán,Baji Zsófia,Basa Péter,Czigány Zsolt,Bársony István,Wang Hsin-Ying,Volk János

Funder

OTKA

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference23 articles.

1. Transparent conducting oxide semiconductors for transparent electrodes;Minami;Semicond. Sci. Technol.,2005

2. Transparent conducting oxides for electrode applications in light emitting and absorbing devices;Liu;Superlattices Microstruct.,2010

3. Effects of a high humidity environment and air anneal treatments on the electrical resistivity of transparent conducting ZnO-based thin films;Asvarov;Phys. Status Solidi,2010

4. Impurity distribution and microstructure of Ga-doped ZnO films grown by molecular beam epitaxy;Kvit;J. Appl. Phys.,2012

5. Ga-doped ZnO films grown on GaN templates by plasma-assisted molecular-beam epitaxy;Ko;Appl. Phys. Lett.,2000

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