Application of the storing matter technique to the analysis of boron doped and implanted SiO2/Si
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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5. Si−useful yields measured in Si, SiC, Si3N4and SiO2: comparison between the Storing Matter technique and SIMS;Surface and Interface Analysis;2014-07-03
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