Novel ceria–polymer microcomposites for chemical mechanical polishing-Reference-Cited by-同舟云学术

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Novel ceria–polymer microcomposites for chemical mechanical polishing

Published:2008-12 Issue:5 Volume:255 Page:3090-3096
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Coutinho Cecil A.,Mudhivarthi Subrahmanya R.,Kumar Ashok,Gupta Vinay K.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference52 articles.

1. Characterization of scratches generated by a multiplaten copper chemical–mechanical polishing process

2. Minimization of chemical-mechanical planarization (CMP) defects and post-CMP cleaning

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