1. Yield enhancement report and table from International Technology Roadmap for Semiconductors (ITRS), 2011 edition, http://www.itrs.net/Links/2011ITRS/Home2011.htm.
2. Fundamentals of Particle Adhesion;Rimai,2001
3. Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology and Applications;Kern,1993
4. Selective growth of CdTe on Si and GaAs substrates using metalorganic vapor phase epitaxy;Zhang;Journal of Electronic Materials,2000
5. Evaluation of megasonic cleaning for sub-90-nm technologies;Vereecke,2005