Funder
National Research Foundation of Korea
Samsung
Reference98 articles.
1. International roadmap for devices and systems;Roadmap;Inst. Electr. Electron. Eng.,2022
2. Fundamentals of Particle Adhesion;Rimai,2001
3. Carbon dioxide snow cleaning;Sherman;Part. Sci. Technol.,2007
4. Removal of 10-nm contaminant particles from Si wafers using CO2 bullet particles;Kim;Nanoscale Res. Lett.,2012
5. G. Vereecke, F. Holsteyns, S. Arnauts, S. Beckx, P. Jaenen, K. Kenis, M. Lismont, M. Lux, R. Vos, J. Snow, P.W. Mertens, Evaluation of megasonic cleaning for sub-90nm technologies, in: Solid State Phenom., Trans Tech Publ, 2005: pp. 141–146. 10.4028/www.scientific.net/SSP.103-104.141.
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