Laser ablation of titanium nitride coated on silicon wafer substrate for depth profiling using ICP-MS
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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4. A review on laser drilling and cutting of silicon;Journal of the European Ceramic Society;2021-08
5. Synthesis and characterization of Titanium Silicon Nitride (TiSiN) thin film: A review;IOP Conference Series: Materials Science and Engineering;2018-06
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