Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference20 articles.
1. Silicides for VLSI Applications;Murarka,1983
2. Thin films-Interdiffusion and Reaction;Poate,1978
3. Elimination of End‐of‐Range Shallow Junction Implantation Damage during CMOS Titanium Silicidation
4. Positron Annihilation in Semiconductors;Krause-Rehberg,1999
5. Identification of Defects in Semiconductors;Saarinen,1998
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献