Wet chemical etching method for BST thin films annealed at high temperature-Reference-Cited by-同舟云学术

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Wet chemical etching method for BST thin films annealed at high temperature

Published:2008-08 Issue:21 Volume:254 Page:6697-6700
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Zhang R.T.,Yang C.R.,Yu A.,Wang B.,Tang H.J.,Chen H.W.,Zhang J.H.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference18 articles.

1. Composition-control of magnetron-sputter-deposited (BaxSr1−x)Ti1+yO3+z thin films for voltage tunable devices

2. La doped Ba1−xSrxTiO3 thin films for tunable device applications

3. Low dielectric loss and enhanced tunability of Ba0.6Sr0.4TiO3 based thin films via material compositional design and optimized film processing methods

4. Microwave properties of tetragonally distorted (Ba0.5Sr0.5)TiO3 thin films

5. Atomic structure of Ba0.5Sr0.5TiO3 thin films on LaAlO3

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3. Design and implementation of combline bandpass tunable filter using barium-strontium-titanate thin-film capacitors;Integrated Ferroelectrics;2017-09-02

4. Wafer–to–wafer transfer process of barium strontium titanate for frequency tuning applications using laser pre-irradiation;Journal of Micromechanics and Microengineering;2015-02-12

5. Study of wet chemical etching of BaSrTiO3 ferroelectric thin films for intelligent antenna application;Journal of Sol-Gel Science and Technology;2015-01-23

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